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Project Director Jun-Bo Yoon Year 2015.08.
Phase Phase 2 2nd year
Research Project 1-2 Ultra-low power electronics convergence devices
Title Increasing Capacitance and Self-Resonant Frequency of the MEMS Switched Capacitor Using High-κ TiO2 and SU-8 Bridged Beam Structure
Journal Journal of Microelectromechanical Systems
File Increasing-Capacitance-and-Self-ResonantFrequency-of-the-MEMS-Switched-CapacitorUsing-High-κ-TiO2-and-SU-8-BridgedBeam-Structure.pdf(2780567)
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